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good SF6 meter system manual

good SF6 meter system manual

Sep 04, 2012Check the numeric specification of aperture, and compare with measured current by pico ampere meter. If measured current is significantly large, it is time to change. 8. Gunhead SF6 refill. Electron gunhead is filled with SF6. Due to natural leakage, SF6 gas needs to be refilled regularly.

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